φ300 compatible CMP device TCRM900
This is a manual CMP device compatible with φ300 wafers. It is ideal for MEMS, TSV, and thin processing.
It is ideal for film processing (CMP) of silicon wafers and thin plate processing. There are devices compatible with Low-K films, conductors, and insulating films. Thin plate processing of wafer materials can also be performed separately with an optional device, allowing for the separation of wafers as thin as 30μm and 50μm.
- Company:テクノライズ株式会社
- Price:Other